Cryogenic characterization of titanium nitride thin films
نویسندگان
چکیده
منابع مشابه
Titanium Nitride Thin Films by the Electron Shower Process
Titanium nitride (TiN), a stable compound with the NaCl structure, has a wide range of properties which find applications in cutting tools, wear resistant parts, semiconductor metallization, and the jewelry industry. However, there are problems with preparing highly adhesive thin films which maintain good properties. Thin films of titanium nitride have been prepared by the Electron Shower (ES) ...
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ژورنال
عنوان ژورنال: Optical Materials Express
سال: 2019
ISSN: 2159-3930
DOI: 10.1364/ome.9.002117